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Vacuum Chambers

 

Vacuum Chamber, Electropolished
 
Large Vacuum Chamber

Applied Vacuum Technology originated as a supplier of ultra-high vacuum (UHV) chambers and weldments for vacuum systems used in surface analysis.  Since 1989, we have become experts in a much wider range of the vacuum spectrum; from moderate vacuum for industrial processes, to extremely high vacuum (XHV) for critical scientific study.   

We manufacture chambers for any production volume; ranging from one-of-a-kind research chambers for National Labs and Universities, to production volume chambers for world-class equipment manufacturers. Our chambers have been used for a wide variety of applications including:

  • Epitaxial and Thin-film Deposition
  • Semiconductor Processing
  • Surface Analysis
  • Mass Spectrometry
  • Space Simulation
  • Nuclear & Particle Physics

AVT is dedicated to providing custom vacuum products to your specifications; while maintaining excellent workmanship and quality standards, delivering your product on-time, and at the lowest possible costs.

 

Integrated Cooling Options for Chambers

Vacuum systems often involve processes with significant thermal output, requiring chambers with integrated cooling options.  Applications involving high heat loads include include: vacuum deposition methods such as CVD, MOCVD, PVD, MBE and IBAD; crystal growth, space simulation, and vacuum furnaces.

Numerous options exist for cooling vacuum chambers.  It is important to consider the effective thermal transfer and cost of these basic options when designing your chamber.              

Chamber Cooling Options:   Thermal Transfer Cost Effectiveness
Double Wall Chamber Very high Very good
Covered Channels (machined into wall)   High Good
Hydro-formed Channels High Good
Welded 'C' Channels Moderate Average
Wrapped Tubes   Low Poor

 

Applied Vacuum Technology has years of experience providing integrated cooling options on vacuum chambers, assemblies flanges.  Our engineering group can assist you with design considerations to meet your cooling requirements.  All chambers and components undergo rigorous testing procedures, including pressure-testing all cooling cavities and helium leak checking all internal and external welds.