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Integrated Cooling Options for Chambers

Vacuum systems often involve processes with significant thermal output, requiring chambers with integrated cooling options. Applications involving high heat loads include: vacuum deposition methods such as CVD, MOCVD, PVD, MBE and IBAD; crystal growth, space simulation, and vacuum furnaces.

Numerous options exist for cooling vacuum chambers. It is important to consider the effective thermal transfer and cost of these basic options when designing your chamber.




Double Wall Chamber


Hydro-formed Chamber


Welded "C" Chamber



Chamber Cooling Options

Double Wall Chamber
Covered Channels (machined into wall)
Hydro-formed Channels
Welded 'C' Channels
Wrapped Tubes

Thermal Transfer

Very High
High
High
Moderate
Low

Cost Effectiveness

Very Good
Good
Good
Average
Poor

Contact AVT Engineering for Quote or Information on Chambers, Components and Integrated Equipment

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